Highly transparent PZT capacitors on glass obtained by layer transfer process

نویسندگان

چکیده

Transparent ITO/PZT/ITO capacitors were fabricated on 200 mm glass substrate. The PZT films of 1 µm and 2 thickness first grown platinized Si wafer by sol–gel method, then transferred onto substrate together with ITO electrodes following an innovative process. obtained based stacks show average transmission about 70% in the visible range. keep their preferred (100) orientation after transfer exhibit ferroelectric, dielectric piezoelectric properties comparable to standard non-transparent metal electrodes. Transverse coefficient e31,f as high 16 C/m2 was measured for both film thicknesses. This proof concept opens way fabrication transparent actuators performances haptic devices, well other emerging applications like self-cleaning or functionalization smart windows.

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ژورنال

عنوان ژورنال: Journal of Materials Science: Materials in Electronics

سال: 2022

ISSN: ['1573-482X', '0957-4522']

DOI: https://doi.org/10.1007/s10854-022-09347-7